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Improved Microfabrication of Acoustic Transducers


Stanford Reference:

97-016


Abstract


This invention is a new fabrication process for microfabricated acoustic transducers. The fabrication scheme is for nitride supported nitride membranes in which the supports are lithographically defined. Subsequent removal of the sacrificial layer does not affect the membrane geometry because of the high selectivity of the etchant. The nitride is effectively an etch stop.

Applications


  • Acoustic transducers

Advantages


  • Allows precise control of transducer membrane geometry
  • Geometry of membrane and support are lithographically defined
  • Membrane does not have any etch vias

Innovators & Portfolio



Patent Status



Date Released

 3/17/2000
 

Licensing Contact


Evan Elder, Licensing Associate
650-725-9558 (Mobile)
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Related Keywords


imaging   imaging: acoustic   ultrasound   transducers   MEMS: bioMEMS   semiconductors   Capacitive Micromachined Ultrasound Transducers (CMUT)   MEMS: MEMS    
 

   

  

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S97-016 Improved Microfabrication of Acoustic Transducers