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Docket #: S15-105

Metal-dielectric hybrid surfaces as integrated optoelectronic interfaces with high optical transmittance and low sheet resistance

Stanford researchers at the Cui Lab have designed a self-aligned hybrid metal-dielectric surface that offers unparalleled performance in applications where both a transparent contact and a photon management texture are needed. Current applications include the front surface of solar cells, photodetectors, camera sensors, and LEDs.
The team has developed a prototype of silicon nanopillars protruding through a patterned gold film. Despite high metal coverage (> 60%), this design had extremely high absorption (>97%) and low sheet resistance of 16 Ohm/sq. This design can be easily implemented in multiple metal-semiconductor systems using a simple one-step fabrication process.

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Stage of Research

  • Continued research on optimizing and scaling up, developing new catalysts and chemistries, and optimizing optical and electrical properties for different applications.
  • Applications

    • Any front surface where photon management is required such as at the front surface of solar cells, photodetectors, camera sensors, LEDs, and other optoelectronic devices

    Advantages

    • Optimized hybrid optoelectronic interface for maximum performance - combines a photon management structure and transparent electrode in one design
    • Versatile – can be used for any surface
    • Low sheet resistance - significantly lower sheet resistance values than any technology currently available
    • Very efficient - up to 97% absorption across 400-900nm light
    • Easy to implement
    • Simple, one-step fabrication process based on metal-assisted chemical etching (MACE)
    • Many different metal and materials stacks possible
      • Silver, gold, copper, aluminum, platinum, palladium, rhodium
      • Si, GaAs, InP explored thus far

    Publications

    Related Links

    Patents