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SUPREM III (Software)


Stanford Reference:

82-050


Abstract


SUPREM III is a program for simulating the fabrication processing of silicon integrated circuits along a one-dimensional line perpendicular to the surface. The primary results of a SUPREM II simulation are the layer thicknesses and impurity distributions.

Applications


  • For simulating the fabrication processing of silicon integrated circuits

Advantages


  • Simulation of layer thicknesses and impority distributions

Innovators & Portfolio



Date Released

 1/29/1999
 

Licensing Contact


Luis Mejia, Senior Licensing Associate
luis.mejia@stanford.edu
(650) 725-9409 (Direct)

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