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SUPREM III (Software)
Stanford Reference:
82-050
Abstract
SUPREM III is a program for simulating the fabrication processing of silicon integrated circuits along a one-dimensional line perpendicular to the surface. The primary results of a SUPREM II simulation are the layer thicknesses and impurity distributions.
Applications
For simulating the fabrication processing of silicon integrated circuits
Advantages
Simulation of layer thicknesses and impority distributions
Innovators & Portfolio
Robert Dutton
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Stephen Hansen
Date Released
1/29/1999
Licensing Contact
Luis Mejia, Senior Licensing Associate
luis.mejia@stanford.edu
(650) 725-9409 (Direct)
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