Researchers in the Khuri-Yakub laboratory have developed patented two dimensional (2D) capacitive micromachined ultrasonic transducer (CMUT) arrays and methods for fabricating them with direct wafer bonding.
Engineers in Prof. Butrus Khuri-Yakub's laboratory have developed a patented, simple, cost efficient, CMUT (capacitive micromachined ultrasonic transducers) fabrication process with incomparable precision and performance.