Micromachined Ultrasonic Transducer Having Compliant Post Structure

Researchers in the Khuri-Yakub Ultrasonics Group have developed a novel micromachined ultrasonic transducer device with improved performance. The unique post structure design creates a translational piston-like movement that generates more average displacement of the top plate in both transmit and reception mode than conventional CMUT (capacitive micromachined ultrasonic transducer). The transducer can be designed for both types of electrostatic actuators, parallel plate or comb-drive. Applications for this technology include imaging and non-destructive testing.

Stage of Research
The inventors have fabricated a prototype and this device is being characterized.