Docket #: S06-456
Breathe Mode (BM) Ring Resonator
Stanford University researchers have developed a microelectromechanical ring resonator structure that oscillates in an elongating/compressing or breathing mode. This breathe-mode resonator functions independently of the process undercut and features fully symmetrical and robust design, low energy loss and larger sensing signals. The breathe mode ring resonator structure has the capacity to provide large signals and may be used for sensing and driving.
Applications
- MEMS
Advantages
- Robust design with very low energy loss
- Improved sensing signals
Patents
- Published Application: 20090058561
- Issued: 7,750,758 (USA)