Stanford engineers have created a patented method for fabricating highly sensitive piezoresistors on vertical walls of microstructures by epitaxial growth of doped silicon.
Stanford University researchers have developed a microelectromechanical ring resonator structure that oscillates in an elongating/compressing or breathing mode.
A novel design for a cross-shape micromechanical resonator that consists of an array of devices suited for integrated single chip frequency references, filter, and sensors.