Docket #: S08-247
Field-Effect Transistor (CNFET), transparent electrodes and three-dimensional integration of CNFETs
Stanford researchers have developed a novel method for wafer-scale production of aligned and ultra-high density carbon nanotubes (CNTs) and nanotube grid. The CNTs produced with this controlled, multiple-transfer technology could be used for making very high performance CNT Field-Effect Transistors (CNFET). The process also allows for three-dimensional integration of the CNFET in a circuit. In addition, the technique can be used to manufacture low cost, highly transparent and low-resistivity electrodes for flexible electronics and flat panel displays.
Applications
- CNFETs for 3-D integrated circuits
- Transparent electrodes for:
- flexible electronics
- flat panel display
Advantages
- Wafer-scale production which reduces the time and cost of manufacturing
- Ultra-high-density CNTs - because the process allows for more than two transfers of CNTs from source substrate
Publications
- U.S. Published Patent Application 20110133284, "MULTIPLE CARBON NANOTUBE TRANSFER AND ITS APPLICATIONS FOR MAKING HIGH-PERFORMANCE CARBON NANOTUBE FIELD-EFFECT TRANSISTOR (CNFET), TRANSPARENT ELECTRODES, AND THREE-DIMENSIONAL INTEGRATION OF CNFETS".
- Hai Wei, N. Patil, A. Lin, H.-S. Philip Wong, S. Mitra. "Monolithic Three-Dimensional Integrated Circuits using Carbon Nanotube FETs and Interconnects", IEEE IEDM 2009 Proceedings. December 6, 2009.
Related Links
Patents
- Published Application: 20110133284
- Issued: 9,748,421 (USA)
Similar Technologies
-
Strong and stable doping of carbon nanotubes and graphene by MoOx for transparent electrodes S12-107Strong and stable doping of carbon nanotubes and graphene by MoOx for transparent electrodes
-
Broadband, polarization-independent, omnidirectional, metamaterial-based antireflection coating for solar cells S16-418Broadband, polarization-independent, omnidirectional, metamaterial-based antireflection coating for solar cells
-
Nanofiber Transparent Electrodes S09-418Nanofiber Transparent Electrodes