Stanford University researchers have developed a microelectromechanical ring resonator structure that oscillates in an elongating/compressing or breathing mode.
A novel design for a cross-shape micromechanical resonator that consists of an array of devices suited for integrated single chip frequency references, filter, and sensors.
A method of fabricating a variable capacitive device for micromachined sensors and actuators. A critical optimization of these capacitors for both sensing and actuation is achieved by maximizing the capacitance change with gap width or overlap area.