Researchers in the Khuri-Yakub laboratory have developed patented two dimensional (2D) capacitive micromachined ultrasonic transducer (CMUT) arrays and methods for fabricating them with direct wafer bonding.
Stanford researchers have developed two related inventions which advance the state-of-the-art of CMUT's (capacitive micromachined ultrasonic transducers).
Engineers in Prof. Butrus Khuri-Yakub's laboratory have developed a patented, simple, cost efficient, CMUT (capacitive micromachined ultrasonic transducers) fabrication process with incomparable precision and performance.