Stanford researchers have developed a method for etching microchannels through silicon substrates. Specifically, this method can produce wafers where the two sides have different features as well as through channels.
Researchers at the SLAC National Accelerator Laboratory have developed a cost-effective method for using low temperature microwave annealing to create diode termination contacts on silicon sensors.
Stanford researchers have patented a fabrication process for monolithic integration of different epitaxial materials on the same substrate for improved coupling of optoelectronic devices.
Engineers in Prof. Butrus Khuri-Yakub's laboratory have developed a patented, simple, cost efficient, CMUT (capacitive micromachined ultrasonic transducers) fabrication process with incomparable precision and performance.